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Found 2 entries in the GSD database.
Manufacturer
Product
Ident Number
GSD Revision
HW Revision
Last Update
GSD File
Bitmap_Device
Bitmap_Diag
Bitmap_SF
BROOKS INSTRUMENT
S-Series MFM
0x5861
2
REV. B
2000
bimf5861.gsd
BROOKS INSTRUMENT
S-Series MFM
0x5861
2
REV. C
2001
bimf5861_2.gsd